| XIE Kai-he,ZHANG Xin,ZHANG Xiao-wei,JIN Han,JIAN Jia-wen.A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region[J].Optoelectronics Letters,2019,15(1):1-5 |
| A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region |
| Author Name | Affiliation | | XIE Kai-he | Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China | | ZHANG Xin | Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China | | ZHANG Xiao-wei | Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China | | JIN Han | Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China | | JIAN Jia-wen | Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China |
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| Abstract: |
| In this paper, a slot microring resonator with a piece of spiral feedback waveguide for CH4 sensing application is proposed. This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region. To reach high sensitivity and good selectivity, slot cross section and spiral feedback waveguide are carefully tailored. The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits. Calculation results show that the sensitivity reaches 1.4×10-2 dB/ppm and the detection limit achieves 700 ppb in the case of Lspiral=100Lr. |
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