Simulation and analysis of Ge resonant-cavity-enhanced photodetectors on silicon-on-insulator substrate
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Chengyi College, Jimei University

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Fujian Provincial Education and Research Project for Young and Middle-Aged Teachers (JAT201030), Provincial Ministerial level scientific research cultivation project of Chengyi college, Jimei university (CK23045).

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    Abstract:

    Ge p-i-n resonant-cavity-enhanced photodetectors (RCE-PDs) grown on silicon-on-insulator substrate are proposed and optimized at 1550 nm for high quantum efficiency and bandwidth. A vertical cavity is formed, consisting of a buried oxide as the top reflector and Si/SiO2 distributed Bragg reflector(DBR) layers as the bottom reflector, to enhance the light-matter interaction within the Ge p-i-n structure. The results demonstrate the optimized Ge RCE-PDs can achieved the quantum efficiency of 23% for the 346nm Ge thickness (34% for the 526 nm Ge thickness) and the high bandwidth of 55 GHz (47 GHz) at 1550 nm with 3 pairs Si/SiO2 DBR. These results indicate that the performance of the Ge RCE-PDs surpasses that of Ge photodetectors without RCE enhancement.

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History
  • Received:June 04,2025
  • Revised:August 13,2025
  • Adopted:September 10,2025
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