Optical waveguide is a device/structure that can precisely control the transmission path and the mode of optical signals. In this work, we report on a method to fabricate a waveguide by exposing a surface of the polished Er3+/Yb3+ co-doped silicate glass to 0.4 MeV H+ ion irradiation with a fluence of 6 × 1016 ions/cm2. The projected range and longitudinal straggling of the irradiated H+ ions were calculated by the SRIM 2013 package. The dark-mode spec-trum of the planar waveguide was measured through the prism coupling technique. The refractive index distribution was obtained by the RCM. The mode distribution of the guiding light was measured by the end-face coupling method. The results are important for application of the waveguides on the base of the H+-irradiated Er3+/Yb3+ co-doped silicate glass in the integrated photonic devices.